INTEGRATED OPTOELECTRONICS RESEARCH GROUP

Department of Electrical Engineering, IIT Madras, Chennai-600036, India

Process Facilities

E-Beam Lithography

Mask Writer

Thermal Evaporator

E-Beam Deposition

Oxidation and Diffusion

PECVD

Mask Aligners 1

Mask Aligners 2

Reactive Ion Etching

ICPRIE

Wire & Die Bonder

Advanced Wafer Dicing

Polishing Machine

>> Characterization Facilities
>> Design Facilities

>> Equipment Facilities at Microelectronics Lab IITM

 IEEE Journal of  Selected Topics in Quantum Electronics, Vol. 23, NO. 2, March /April 2017. DOI: 10.1109/JSTQE.2016.2596259

 

    









   © 2016, IOLAB IIT Madras         

Quick links IIT Madras Dept. of Electrical Engineering Industrial Consultancy & Sponsored Research (ICSR) Center for NEMS and Nanophotonics (CNNP) Microelectronics and MEMS Lab Photonics @ IITM OSA Chapter IITM Workflow IITM Central Workshop