MEMS

Photolithography
Mask Aligner(Karl Suss MA6_BA6)
Mask Aligner (OAI Model 5000)
E-beam Lithography
E-beam Lithography
Oxidation & Diffusion
SVCS (4 Stack Furnace)
Tempress Omega
Thin Film Deposition
PECVD
LPCVD (Tempress)
Dry Etching
ICPRIE – F- Chemistry
ICPRIE – Cl- Chemistry
Metallization
Thermal Evaporation - Hydro Pneo Vac Technologies HPVT-305G
E-beam Evaporation ( HHV ) - Hind Hi Vac BC-300T
E-beam Evaporation - BOC Edwards Auto 306
DC Sputtering - Hind High Vac
RF Sputtering - Hind High Vac
Polishing
Ultratech Ultrapol USA
Bonding
Bond Aligner - Karl Suss BA6/MA6
Substrate Bonder - Karl Suss SB6
Wire and Die Bonder TPT HB10
Dicing
Ultratech USA- Ultraslice
Advanced Dicing Technology 7100-Provectvs
Electrical
Probe Station - Cascade Mictrotech Summit 12000AP
Probe Station (Thermal) - Cascade Microtech Summit 11000M
Probe Station (Vacuum) - Cascade Microtech PLV50
Microsystem Analyser – Vibrometer Polytec MSA-500
Keithley LIV Test Kit Dual Channel Picometer Keithley 2502, Source meter Keithley 2440 5A Auto-tuning TEC Source Meter Keithley 2510-AT
Analysers and Meters Semiconductor Device Analyzers Agilent Technologies B1500A
Analysers and Meters LCR meter Agilent Technologies 4285A
Optical
Ellipsometer Gaertner L2W16SF544
Ellipsometer Woollam Spectroscopic Ellipsometer M-2000VI EC-400
Surface profiler Veeco NT-1100 profiler
Surface profiler- Bruker 3D Non-contact Profiler Contour GT
Confocal Microscope Olympus LEXT 3D Measuring Laser Microscope OLS4000
Microscope Nikon Eclipse LV-150A
Microscope Leitz
Microscope Leica Microsystems DM6000M
Electron Microscope
Electron Microscope